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A Robust Angular Rate Sensor Utilizing 2:1 Auto-Parametric Resonance Excitation
Bhargav Gadhavi1, Farid Golnaraghi1, Behraad Bahreyni1
1School of Mechatronic Systems Engineering, Simon Fraser University, Surrey, BC V3T 0A3, Canada.
Sensors (Basel, Switzerland)
|October 27, 2022
Summary
This study introduces a novel single-axis angular rate sensor that overcomes limitations of traditional designs. It achieves a wider bandwidth and stable performance using auto-parametric resonance, enhancing gyroscope technology.
Area of Science:
- MEMS (Micro-Electro-Mechanical Systems) technology
- Sensor design and fabrication
- Nonlinear dynamics and control systems
Background:
- Conventional Micromachined Vibratory Gyroscopes (MVGs) in open-loop configurations suffer from narrow frequency bandwidths and unstable scale factors.
- These limitations hinder their performance in applications requiring wide operational frequency ranges and precise measurements.
- Addressing these shortcomings is crucial for advancing inertial sensing capabilities.
Purpose of the Study:
- To develop a single-axis angular rate sensor with improved robustness to operating voltage and frequency variations.
- To overcome the narrow bandwidth and unstable scale factor issues inherent in conventional MVGs.
- To leverage nonlinearities for enhanced sensor performance.
Main Methods:
- Utilized inherent forcing and inertial nonlinearities from electrostatic forces and fabrication imperfections.
- Employed 2:1 auto-parametric resonance to excite the sensor's sense mode.
- Designed a single-axis angular rate sensor architecture.
Main Results:
- Achieved a -3 dB frequency bandwidth of 500 Hz, significantly broader than conventional designs.
- Demonstrated a stable scale factor of 50 μV/°/s.
- Obtained a wide dynamic range of ±330°/s, indicating robust performance.
Conclusions:
- The developed single-axis angular rate sensor exhibits enhanced robustness and a broader frequency bandwidth.
- The use of auto-parametric resonance effectively addresses limitations of conventional MVGs.
- This sensor design offers a promising advancement for inertial sensing applications.
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