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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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Plastic deformation in silicon nitride ceramics via bond switching at coherent interfaces

Jie Zhang1, Guanghua Liu1, Wei Cui1

  • 1State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, P.R. China.

Science (New York, N.Y.)
|October 27, 2022
PubMed

Keywords:
Silicon nitride ceramicsPlastic deformation mechanismsCoherent interfacesBond switching in materials

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