Cavity-Enhanced 2D Material Quantum Emitters Deterministically Integrated with Silicon Nitride Microresonators

Area of Science:

• Quantum photonics
• 2D materials
• Optoelectronics

Background:

• Optically active defects in 2D materials (hBN, TMDs) are promising single-photon sources.
• Existing methods face challenges in precise emitter placement and efficient light coupling.
• Room-temperature operation and tunability are key advantages of these quantum emitters.

Purpose of the Study:

• To develop a novel method for precisely aligning and embedding 2D materials within microring resonators.
• To enhance the performance of single-photon emitters through cavity quantum electrodynamics.
• To demonstrate a scalable fabrication process for on-demand quantum photonic chips.

Main Methods:

• Fabrication of background-free silicon nitride microring resonators.
• Precise alignment and embedding of hexagonal boron nitride (hBN) and transition-metal dichalcogenides (TMDs).
• Utilizing the Purcell effect for cavity-enhanced light-matter interaction.

Main Results:

• Achieved cavity-enhanced spectral coupling efficiency of up to 46% for hBN emitters at room temperature.
• Exceeded the theoretical limit for cavity-free waveguide-emitter coupling.
• Demonstrated 100 nm positioning accuracy and CMOS-compatible fabrication without optical property degradation.

Conclusions:

• The developed method enables highly efficient, on-demand single-photon sources.
• This approach paves the way for scalable integration of quantum emitters into photonic circuits.
• The robust fabrication process ensures high performance and reliability for quantum photonic applications.