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Influence of Hybrid Perovskite Fabrication Methods on Film Formation, Electronic Structure, and Solar Cell Performance
Published on: February 27, 2017
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High-Efficiency Perovskite Solar Cells with Sputtered Metal Contacts
Tengxiao Ji1, Roxanna S Delima2,3, David J Dvorak3
1Department of Chemistry, The University of British Columbia, 2036 Main Mall, Vancouver, British ColumbiaV6T 1Z1, Canada.
ACS Applied Materials & Interfaces
|November 2, 2022
Summary
Aerial oxidation can reverse sputter deposition damage in perovskite solar cells (PSCs). This post-sputtering treatment improves device efficiency and stability, crucial for scalable PSC manufacturing.
Area of Science:
- Materials Science
- Renewable Energy
- Device Physics
Background:
- Sputter deposition offers advantages for creating scalable metal contacts in perovskite solar cells (PSCs).
- However, the sputter deposition process can induce damage to sensitive underlying layers within the PSC structure.
Purpose of the Study:
- To investigate if post-sputtering aerial oxidation can mitigate or reverse the damage caused by sputter deposition of metal contacts in PSCs.
- To compare the performance and stability of PSCs fabricated with sputtered gold (Au) contacts treated with oxidation against those with thermally evaporated Au contacts.
Main Methods:
- Fabrication of perovskite solar cells (PSCs) using sputter deposition for gold (Au) metal contacts.
- Application of a post-sputtering aerial oxidation step to specific PSCs.
- Characterization of device performance (efficiency) and stability.
- Analysis of the molecular order and atomic diffusion within the hole transport layer (HTL) using experimental techniques.
Main Results:
- PSCs with sputtered Au contacts, followed by aerial oxidation, achieved higher power conversion efficiencies (18.7%) compared to those with thermally evaporated Au contacts (18.4%).
- The post-sputtering oxidation step was shown to reconstruct the molecular order of the hole transport layer (HTL).
- Oxidation effectively reversed the diffusion of Au atoms into the HTL, a detrimental effect of sputtering.
Conclusions:
- Post-sputtering aerial oxidation is a viable method to repair sputter-induced damage in PSCs, enhancing device performance.
- This oxidation step restores the HTL's molecular integrity and prevents metal diffusion, previously overlooked in fabrication.
- The findings are significant for the scalable manufacturing of high-quality perovskite solar cells using sputtering techniques.

