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Method of micro hole tilt adjustment based on a vision-guided touch probe
Optics Express
|November 11, 2022
Summary
A novel vision-guided probe method enables rapid, efficient measurement of high-aspect-ratio micro-holes. This technique is crucial for miniaturized aerospace devices requiring high precision measurements.
Area of Science:
- Metrology
- Aerospace Engineering
- Micro-manufacturing
Background:
- Increasing demand for miniaturization and high precision in aerospace.
- Challenges in measuring geometric parameters of high-aspect-ratio micro-holes.
Purpose of the Study:
- To propose a vision-guided contact probe method for efficient micro-hole geometric parameter measurement.
- To address the need for rapid and accurate measurements in high-performance devices.
Main Methods:
- Utilizing vision measurement principles for preliminary geometric parameter determination from micro-hole images.
- Establishing a collaborative vision-probe measurement model.
- Employing a five-axis measuring system for guiding the probe into the hole.
Main Results:
- Successful measurement of a 3 mm diameter hole at various angles.
- Preliminary experimental validation of the method's effectiveness and feasibility.
Conclusions:
- The proposed vision-guided probe method is effective for measuring geometric parameters of inclined micro-holes.
- This technique offers a feasible solution for the precise measurement requirements in aerospace and other advanced fields.

