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    This study introduces a novel 3D measurement technique for precise nanoscale displacement detection. The method accurately measures X, Y, and Z movements of a 2D grating using dual-channel Littrow incidence.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Nanotechnology

    Background:

    • Accurate three-dimensional (3D) displacement measurement is crucial in advanced manufacturing and scientific research.
    • Existing methods often face limitations in resolution, accuracy, or the ability to measure multiple axes simultaneously.

    Purpose of the Study:

    • To develop and validate a novel 3D measurement method for nanoscale displacement detection.
    • To achieve synchronous measurement of displacements in the X, Y, and Z directions using a 2D grating.

    Main Methods:

    • A 3D measurement approach utilizing a 2D grating with dual-channel and Littrow equal-optical path incidence.
    • Employing a turning element to facilitate interference between diffracted light (frequency f1) and reference light (frequency f2).
    • Applying a separation-dual-channel phase decoupling algorithm for displacement data acquisition.

    Main Results:

    • Experimental validation on a constructed platform demonstrated linearity errors within ±60 nm over a 10 mm range for all three directions.
    • The achieved test resolution was within ±5 nm.
    • Successful synchronous nanoscale measurement of 3D displacements in the X, Y, and Z directions was confirmed.

    Conclusions:

    • The proposed method offers a robust solution for high-precision, multi-directional nanoscale displacement measurement.
    • The dual-channel Littrow incidence technique combined with phase decoupling provides excellent accuracy and resolution.
    • This technology has potential applications in fields requiring precise motion control and metrology.