Related Experiment Video
Updated: Aug 21, 2025
Operation of the Collaborative Composite Manufacturing CCM System
Published on: October 1, 2019
Design of multi-axis micromotion system in TERS and its nonlinearity and crosstalk correction method
Yu-Liang Zhi1, Jian-Sheng Chen1, Zhi-Peng Liao1
1Department of Instrumental and Electrical Engineering, School of Aerospace Engineering, Xiamen University, Xiamen, Fujian 361005, China.
Abstract:
Tip-Enhanced Raman Spectroscopy (TERS) is an advanced analytical measurement technology combining Raman spectroscopy with Scanning Probe Microscopy, which can detect the molecular structure and chemical composition in micro-nano-scale. As an indispensable part, the micromotion system directly determines TERS spatial resolution. The existing multi-axis system is often composed of several single-axis nonlinear systems, which solves whole problems with a superposition idea of single-axis part. But the multi-axis crosstalk under an overall idea is not fully considered and will cause system uncooperative and even oscillational. Therefore, a multi-axis micromotion system in TERS and its correction method are proposed. The improved Duhem model, simple calculation without inversion, accurate matching and fast response, has been built for nonlinearity. And the feedforward decoupling method is designed for crosstalk, having a favorable multi-axis coordination, good error tracking and simplified controllers. Experimental results show that it can greatly correct the nonlinearity and crosstalk of multi-axis system simultaneously.
Related Concept Videos
01:21Linear Approximation in Time Domain
For a simple pendulum with a mass evenly distributed along its length and the center of mass located at half the pendulum's length,...
01:26Feedback control systems
Linear feedback systems are theoretical models that simplify analysis and design. These systems operate under the principle that their output is directly proportional to their input within certain ranges. For instance, an amplifier in a control system behaves linearly as long as the input signal remains within a specific range. However, most physical systems exhibit inherent nonlinearity...
01:24One-Degree-of-Freedom System
A one-degree-of-freedom system is defined by an independent variable that determines its state and behavior. One example of a one-degree-of-freedom system is a simple harmonic oscillator, such as a...