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3D microscopy in industrial measurements.

Xiaoyu You1,2,3,4, Jing Liu1,2,3,4, Yifei Li1,2,3,4

  • 1Advanced Microscopy and Instrumentation Research Centre, Harbin Institute of Technology, Harbin, Heilongjiang, China.

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Summary

3D microscopy is crucial for industrial quality control, ensuring microdevice performance and yield. This review surveys advanced techniques and challenges, guiding future research in defect detection and dimensional calibration for microdevice manufacturing.

Keywords:
3D calibration3D microscopycritical dimensionsdefect detectionindustrial measurements

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Area of Science:

  • Materials Science
  • Metrology
  • Manufacturing Engineering

Background:

  • Quality control is vital for microdevice performance and yield in industrial manufacturing.
  • 3D microscopy is a key technology for monitoring processing quality, inspecting critical dimensions, and detecting defects.
  • Advancements in manufacturing necessitate new developments in 3D microscopy for high-performance microdevices.

Purpose of the Study:

  • To provide a comprehensive survey of the state-of-the-art in 3D microscopy for industrial measurements.
  • To identify and discuss current challenges and future development opportunities in the field.
  • To offer guidance to researchers and developers on selecting appropriate 3D microscopy techniques.

Main Methods:

  • Review of existing literature and techniques in 3D microscopy for industrial applications.
  • Analysis of advantages and limitations of various 3D microscopy methods.
  • Exploration of emerging areas such as diffraction limit breakthroughs, AI applications, and defect characterization.

Main Results:

  • Identified key challenges including diffraction limits, precise dimensional calibration, and high-accuracy defect analysis.
  • Highlighted opportunities in advanced 3D characterization, defect property determination, and artificial intelligence integration.
  • Detailed the applicability of different 3D microscopy techniques for specific industrial measurement needs.

Conclusions:

  • 3D microscopy is indispensable for modern microdevice manufacturing quality control.
  • Future research should focus on overcoming current limitations and leveraging new technologies like AI.
  • This review serves as a guide for selecting optimal 3D microscopy solutions for industrial metrology.