Water-Immersion Laser-Scanning Annealing for Improving Polycrystalline Au Films

Shang-Yang Yu1, Min-Hsiung Shih2, Yun-Cheng Ku3

  • 1Department of Mechanical Engineering, Chang Gung University, 259 Wen-Hwa 1st Rd., Taoyuan 333323, Taiwan.

ACS Omega
|November 28, 2022
PubMed
Summary

This study introduces a new method called water-immersion laser-scanning annealing (WILSA) to improve the quality of gold (Au) films used in biosensors. The process uses laser scanning while the film is submerged in water. The method increases grain size and improves crystal orientation, reducing grain boundaries. This lowers electron scattering and surface plasmon damping, especially in the near-infrared range. The treated films remain intact without pinholes, a common issue with traditional methods. The study also shows that biosensors using these films have better performance in plasmon propagation and refractive index sensitivity. The results suggest WILSA is a promising post-process for enhancing biosensor sensitivity.

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