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Updated: Aug 19, 2025

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Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
Published on: April 4, 2017
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All-silicon light-emitting diodes waveguide-integrated with superconducting single-photon detectors.
Sonia Buckley1, Jeffrey Chiles1, Adam N McCaughan1
1National Institute of Standards and Technology, Boulder, Colorado 80305, USA.
Summary
We developed cryogenic, electrically injected silicon light-emitting diodes (LEDs) emitting at 1.22 µm. This scalable platform integrates LEDs with superconducting nanowire single-photon detectors (SNSPDs) for advanced photonic applications.
Area of Science:
- Photonics and optoelectronics
- Semiconductor device physics
- Quantum information science
Background:
- Silicon photonics is crucial for integrated circuits, but efficient light emission remains a challenge.
- Existing silicon light sources often lack integration capabilities with detectors.
- Mid-infrared emission is vital for various sensing and communication applications.
Purpose of the Study:
- To demonstrate cryogenic, electrically injected silicon light-emitting diodes (LEDs) operating at 1.22 µm.
- To integrate these silicon LEDs with superconducting nanowire single-photon detectors (SNSPDs) on a single chip.
- To showcase the scalability of this integrated platform.
Main Methods:
- Fabrication of waveguide-coupled silicon LEDs using W-center implantation in a p-i-n diode structure.
- Cryogenic testing of the light-emitting diodes to characterize their performance.
- Integration of LEDs with superconducting nanowire single-photon detectors on silicon photonic waveguides.
Main Results:
- Successful demonstration of cryogenic, electrically injected silicon LEDs emitting at 1.22 µm.
- Integration of a single silicon LED with eleven superconducting nanowire single-photon detectors on a chip.
- Validation of the platform's scalability and potential for complex photonic circuits.
Conclusions:
- The developed silicon LED platform offers a promising route for integrated optoelectronics at 1.22 µm.
- The integration with SNSPDs paves the way for on-chip quantum photonic systems.
- This scalable approach advances the development of silicon-based light sources and detectors.

