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Circular Subaperture Stitching Interferometry Based on Polarization Grating and Virtual-Real Combination

Yao Hu¹, Zhen Wang¹, Qun Hao^1,2

¹Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.

Sensors (Basel, Switzerland)

|December 11, 2022

Summary

This summary is machine-generated.

This study introduces a novel polarization grating interferometer for testing small F/# concave surfaces. This system simplifies subaperture scanning, reducing errors and enabling direct full-aperture figure error measurement.

Keywords:

polarization grating subaperture stitching virtual–real combination interferometer

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Area of Science:

Optical Engineering
Metrology
Interferometry

Background:

Traditional subaperture stitching interferometry often requires complex multi-axis motion-control systems.
Testing small F-number (F/#) concave surfaces with large F/# transmission spheres presents significant metrological challenges.
Mechanical adjustments in conventional systems can introduce substantial measurement errors.

Purpose of the Study:

To present a compact polarization grating based circular subaperture stitching interferometer.
To enable efficient testing of small F/# concave optical surfaces.
To reduce measurement errors associated with mechanical adjustments and complex stitching algorithms.

Main Methods:

Utilized a polarization grating for axial rotation-based subaperture scanning, eliminating the need for multi-axis motion.
Employed a virtual interferometer model combined with a virtual-real combination algorithm to eliminate retrace errors.
Developed a method for direct full-aperture figure error acquisition without complex stitching.

Main Results:

Demonstrated a significantly smaller system size compared to traditional interferometers.
Verified the feasibility of the virtual-real combination algorithm through simulations and experimental confirmation of polarization grating capability.
Identified and analyzed measurement errors, including those from modeling errors.

Conclusions:

The polarization grating based interferometer offers a more compact and accurate solution for testing small F/# concave surfaces.
The developed algorithm effectively removes retrace errors and allows direct figure error determination.
This research holds pioneering significance for the application of polarization gratings in advanced interferometric metrology.