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Fabrication and Testing of Photonic Thermometers

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Published on: October 24, 2018

Optical Temperature Sensor Based on Polysilicon Waveguides.

Xinru Xu¹, Yuexin Yin¹, Chunlei Sun^2,3

¹State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.

Sensors (Basel, Switzerland)

|December 11, 2022

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This summary is machine-generated.

New on-chip temperature sensors using polysilicon waveguides offer improved sensitivity and faster response times. These compact photonic-electronic devices are compatible with CMOS fabrication, promising cost-effective, high-performance temperature detection.

Area of Science:

Photonics
Integrated Optics
Semiconductor Devices

Background:

Traditional temperature sensors face limitations in accuracy and speed.
Chip-level photoelectric sensors utilizing the thermo-optic effect offer enhanced sensitivity and reduced costs.

Purpose of the Study:

To present novel on-chip temperature sensors based on polysilicon (p-Si) waveguides.
To demonstrate the performance of dual-microring resonator (MRR) and asymmetric Mach-Zehnder interferometer (AMZI) sensor designs.

Main Methods:

Fabrication of on-chip temperature sensors using polysilicon waveguides.
Integration of dual-microring resonator (MRR) and asymmetric Mach-Zehnder interferometer (AMZI) configurations.
Characterization of sensor performance based on the thermo-optic effect.

Keywords:

AMZI dual-microring resonator polysilicon temperature sensors

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Main Results:

Demonstrated sensitivities of 86.6 pm/K for AMZI sensors and 85.7 pm/K for MRR sensors.
Confirmed compatibility with complementary metal-oxide-semiconductor (CMOS) fabrication processes.
Achieved high sensitivity and a compact footprint for the developed sensors.

Conclusions:

The proposed polysilicon waveguide-based temperature sensors exhibit high sensitivity and are CMOS-compatible.
These sensors present a promising solution for advanced photonic-electronic applications requiring precise temperature monitoring.
The compact design and enhanced performance pave the way for next-generation temperature sensing technologies.