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Analysis and Correction of Measurement Error of Spherical Capacitive Sensor Caused by Assembly Error of the Inner

Tianxiang Ma1, Shengqi Yang2,3, Yongsen Xu2

  • 1Information and Communication Engineering, School of Electronic and Information Engineering, Changchun University of Science and Technology, Changchun 130022, China.

Sensors (Basel, Switzerland)
|December 11, 2022
PubMed

Keywords:
2-DOF angular displacement measurementfour-quadrant differential structureinstallation error compensationspherical capacitive angular sensor

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