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Three-dimensional Optical-resolution Photoacoustic Microscopy
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Photoacoustic methane detection inside a MEMS microphone.

Thomas Strahl1,2, Jonas Steinebrunner2, Christian Weber1,2

  • 1Laboratory for Gas Sensors, Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, Freiburg, 79110, Germany.

Photoacoustics
|December 22, 2022
PubMed
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This study presents a novel, miniaturized photoacoustic gas sensor for detecting methane (CH4) trace gas. The innovative design utilizes a MEMS microphone as a compact sensor component, achieving high sensitivity and cost-efficiency for methane detection.

Area of Science:

  • Gas sensing technologies
  • Laser-based spectroscopy
  • Micro-electro-mechanical systems (MEMS)

Background:

  • Photoacoustic (PA) gas sensing offers high sensitivity for trace gas detection.
  • Miniaturization of PA sensors is crucial for portable and cost-effective applications.
  • Methane (CH4) detection is vital for environmental monitoring and safety.

Purpose of the Study:

  • To develop and investigate an innovative, miniaturized laser-based photoacoustic gas sensing concept for methane trace gas detection.
  • To utilize a MEMS microphone as an integrated component for PA signal generation and detection.
  • To assess the sensor's performance, including limit of detection and long-term stability.

Main Methods:

  • An interband cascade laser (ICL) targeting a methane absorption line was used.
Keywords:
Gas sensingLaser spectroscopyMEMS microphoneMethanePhotoacoustic

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  • The ICL was focused into the sound port of a MEMS microphone to generate PA signals.
  • Wavelength modulation spectroscopy (2f-WMS-PAS) was employed for signal detection at various frequencies.
  • Methane concentrations were varied between 0 and 10 ppm in N2 for sensitivity testing.

    • Main Results:

    • A resonant methane detection was achieved at 41.8 kHz.
    • A limit of detection (LOD) of 329 ppb for methane was estimated.
    • Long-term stability was demonstrated in ambient air measurements.
    • A noise equivalent concentration (NEC) of 14 ppb (at 10s averaging time) and NNEA were calculated.

    Conclusions:

    • The developed MEMS-based photoacoustic sensor demonstrates potential for extreme miniaturization.
    • The sensor offers a highly sensitive and cost-efficient solution for trace methane gas detection.
    • This technology is promising for various applications requiring compact and effective gas sensing.