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MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics.

Ilker S Bayer¹

¹Smart Materials, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy.

|December 23, 2022

Summary

Microelectromechanical systems (MEMS) sensors enhance robotic hands for better object manipulation. These lightweight, integrated sensors improve dexterity by detecting forces, slippage, and distance, simulating human touch.

Keywords:

MEMS capacitance hardness robotics sensors tactile sensing triboelectric

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Area of Science:

Robotics
Sensor Technology
Microelectromechanical Systems (MEMS)

Background:

Robotic manipulation faces challenges in contact force control and approach motion.
Microelectromechanical Systems (MEMS) offer advanced sensing solutions for robots.

Purpose of the Study:

To review MEMS-based tactile, force, and pressure sensors for robotic applications.
To analyze the integration of MEMS sensors for dexterous manipulation and human-like sensations.

Main Methods:

Analysis of various MEMS sensing mechanisms (capacitive, resistive, piezoresistive, triboelectric).
Integration of MEMS sensors with flexible materials and textiles for advanced robotics.
Review of off-the-shelf MEMS sensors, including barometric sensors.

Main Results:

MEMS sensors enable robots to detect contact forces, slippage, and object distances effectively.
Integrated MEMS sensors are lightweight, space-efficient, and can simulate human finger sensations (gripping, hardness, stiffness).
MEMS technology facilitates the development of flexible and snake robots.

Conclusions:

MEMS sensors are crucial for improving robotic hand dexterity and object manipulation.
The integration of MEMS offers new capabilities for health, security, safety, and environmental protection through advanced robotics.