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Fabrication of Schottky Diodes on Zn-polar BeMgZnO/ZnO Heterostructure Grown by Plasma-assisted Molecular Beam Epitaxy
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Integrating a Soft Body Diode in the Super-Junction MOSFET by Using an n-/n+-Buffer Layer

Zhi Lin1, Wei Zeng1, Da Wang1

  • 1School of Microelectronics and Communication Engineering, Chongqing University, Chongqing 400044, China.

Micromachines
|December 23, 2022
PubMed

Keywords:
body diodebuffer layeroscillationreverse recoverysuper-junction MOSFET

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