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Concepts and Key Technologies of Microelectromechanical Systems Resonators
Tianren Feng1, Quan Yuan1, Duli Yu1
1College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China.
Micromachines
|December 23, 2022
Summary
Micro-Electro-Mechanical Systems (MEMS) resonators show promise for replacing quartz in timing and sensor applications. This review details their performance, challenges, and future development for improved applications.
Area of Science:
- Vibration Engineering
- Micro-Electro-Mechanical Systems (MEMS)
Background:
- MEMS resonators are emerging as a potential replacement for traditional quartz resonators.
- Key applications include timing, frequency generation, and resonant sensing.
Purpose of the Study:
- To provide a comprehensive overview of MEMS resonator technology.
- To summarize performance parameters, key technologies, and future trends.
- To offer scientific and technical support for improving MEMS resonator applications.
Main Methods:
- Review of existing literature on MEMS resonator concepts.
- Analysis of performance parameters like quality factor, frequency accuracy, and temperature stability.
- Summary of key technologies and development status.
Main Results:
- Description of fundamental MEMS resonator concepts: equivalent models, vibration modes, and conduction mechanisms.
- Identification of critical performance parameters and enabling technologies.
- Overview of current development status, challenges, and future directions.
Conclusions:
- MEMS resonators offer significant potential in vibration engineering applications.
- Improvements are needed to overcome limitations in practical applications.
- This work supports the advancement of MEMS resonators for timing, frequency, and sensor applications.
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