Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

Three-Dimensional Microscopy in Microbiology01:28

Three-Dimensional Microscopy in Microbiology

187
Three-dimensional imaging techniques are essential in cell biology, allowing researchers to visualize intricate cellular structures with high resolution. Two prominent methods, Differential Interference Contrast Microscopy (DIC) and Confocal Scanning Laser Microscopy (CSLM), provide distinct advantages for imaging live and thick specimens, respectively.Differential Interference Contrast MicroscopyDIC microscopy enhances contrast in transparent, unstained samples by converting phase...
187
Electron Microscope Tomography and Single-particle Reconstruction01:07

Electron Microscope Tomography and Single-particle Reconstruction

2.5K
Transmission electron microscopy (TEM) can be used to determine the 3D structure of biological samples with the help of techniques such as electron microscope tomography and single-particle reconstruction. While single-particle reconstruction can examine macromolecules and macromolecular complexes in vitro conditions only, tomography permits the study of cell components or small cells in vivo.
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...
2.5K

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Kinetically Controlled Direct In Situ Photolithography of Perovskite Color-Conversion Layers.

Small (Weinheim an der Bergstrasse, Germany)·2026
Same author

4-1BBL on monocyte lineage cells rather than on classical dendritic cells drives CD8<sup>+</sup> T cell accumulation in the respiratory tract and protects from severe respiratory influenza infection.

Mucosal immunology·2026
Same author

Previable Preterm Premature Rupture of the Membranes Reaching Viability: Canadian Outcomes.

Journal of obstetrics and gynaecology Canada : JOGC = Journal d'obstetrique et gynecologie du Canada : JOGC·2026
Same author

All-Solid-State Lithium-Sulfur Batteries: Recent Progress, Challenges, and Perspectives.

Materials (Basel, Switzerland)·2026
Same author

Carbon Interlayer with Uniformly Anchored ZnO Nanoparticles: Surface-Energy-Driven Coble Creep for Practical Anode-Free Solid-State Batteries.

Advanced science (Weinheim, Baden-Wurttemberg, Germany)·2026
Same author

Deciphering Interfacial Electronic Interactions Between Iridium Oxide and Ni-Based Supports for High-Current-Density Anion Exchange Membrane Water Electrolysis.

Small (Weinheim an der Bergstrasse, Germany)·2026

Related Experiment Video

Updated: Aug 16, 2025

Uncovering Hidden Dynamics of Natural Photonic Structures Using Holographic Imaging
05:45

Uncovering Hidden Dynamics of Natural Photonic Structures Using Holographic Imaging

Published on: March 31, 2022

2.7K

Multi spectral holographic ellipsometry for a complex 3D nanostructure.

Jaehwang Jung, Wookrae Kim, Jinseob Kim

    Optics Express
    |December 23, 2022
    PubMed
    Summary
    This summary is machine-generated.

    We developed self-interferometric pupil ellipsometry (SIPE) for advanced semiconductor metrology. This innovative technique offers high sensitivity and small spot analysis, addressing critical industry challenges.

    More Related Videos

    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
    10:28

    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

    Published on: July 5, 2016

    10.4K
    Hyperspectral Imaging as a Tool to Study Optical Anisotropy in Lanthanide-Based Molecular Single Crystals
    07:24

    Hyperspectral Imaging as a Tool to Study Optical Anisotropy in Lanthanide-Based Molecular Single Crystals

    Published on: April 14, 2020

    17.4K

    Related Experiment Videos

    Last Updated: Aug 16, 2025

    Uncovering Hidden Dynamics of Natural Photonic Structures Using Holographic Imaging
    05:45

    Uncovering Hidden Dynamics of Natural Photonic Structures Using Holographic Imaging

    Published on: March 31, 2022

    2.7K
    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
    10:28

    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

    Published on: July 5, 2016

    10.4K
    Hyperspectral Imaging as a Tool to Study Optical Anisotropy in Lanthanide-Based Molecular Single Crystals
    07:24

    Hyperspectral Imaging as a Tool to Study Optical Anisotropy in Lanthanide-Based Molecular Single Crystals

    Published on: April 14, 2020

    17.4K

    Area of Science:

    • Optical Metrology
    • Semiconductor Manufacturing
    • Advanced Materials Characterization

    Background:

    • Traditional ellipsometry faces limitations in sensitivity and spot size for advanced semiconductor device metrology.
    • Existing techniques struggle with complex 3D structures and on-cell overlay measurements.
    • High metrology sensitivity is crucial for ensuring quality and yield in semiconductor fabrication.

    Purpose of the Study:

    • To introduce and validate a novel ellipsometry technique, self-interferometric pupil ellipsometry (SIPE).
    • To demonstrate SIPE's capability for high-sensitivity metrology on advanced semiconductor devices.
    • To showcase SIPE's advantages in terms of angle-resolved information, spot size, and parameter correlation reduction.

    Main Methods:

    • Integration of self-interference and pupil microscopy into a single ellipsometry technique (SIPE).
    • Acquisition of single-shot holographic data to extract rich angle-resolved ellipsometric information.
    • Simultaneous acquisition of full spectral data across a wide range of incident (0°-70°) and azimuthal (0°-360°) angles.

    Main Results:

    • SIPE achieved a metrology sensitivity of up to 0.123 nm.
    • Demonstrated small spot metrology capability with an illumination spot diameter as small as 1 µm.
    • Successfully validated on various samples, including thin films, 3D structures, and on-cell overlay on semiconductor wafers.
    • Significant reduction in undesirable multiple parameter correlation due to extensive angular spectral data collection.

    Conclusions:

    • Self-interferometric pupil ellipsometry (SIPE) is a powerful new tool for advanced semiconductor metrology.
    • SIPE offers superior sensitivity, spatial resolution, and data richness compared to conventional methods.
    • The technique effectively addresses critical metrology challenges in the semiconductor industry, enabling improved device characterization and quality control.