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Design and Research of Chromatic Confocal System for Parallel Non-Coaxial Illumination Based on Optical Fiber Bundle
Yali Zhang1, Qing Yu1,2, Chong Wang1
1College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China.
Sensors (Basel, Switzerland)
|December 23, 2022
Summary
This study introduces a novel parallel non-coaxial-illumination chromatic confocal system using an optical fiber bundle. This enhanced system significantly improves measurement efficiency and accuracy for 3D surface topography reconstruction.
Area of Science:
- Optics and Photonics
- Metrology
- Surface Science
Background:
- Conventional chromatic confocal systems suffer from low signal-to-noise ratio and limited measurement efficiency.
- Single-point coaxial illumination restricts throughput and overall utility.
Purpose of the Study:
- To develop a parallel non-coaxial-illumination chromatic confocal system for enhanced measurement performance.
- To overcome the limitations of existing single-point systems by improving efficiency and signal quality.
Main Methods:
- Utilized an optical fiber bundle as an optical beam splitter for parallel measurements.
- Implemented line scanning for rapid data acquisition.
- Verified system performance through calibration experiments on step height, transparent specimen thickness, and 3D surface topography.
Main Results:
- Achieved a measurement range of 200 μm.
- Demonstrated measurement accuracy at the micron level.
- Successfully reconstructed the 3D topography of stepped and coin surfaces.
Conclusions:
- The proposed parallel non-coaxial-illumination system offers a significant improvement in measurement efficiency and accuracy.
- The system is effective for precise 3D surface topography reconstruction.
- This technology holds promise for advanced metrology applications.

