Three-dimensional modeling and experimentation of microfluidic devices driven by surface acoustic wave

Surface acoustic wave (SAW) technology is proving to be an effective tool for manipulating micro-nano particles. In this paper, we present a fully-coupled 3D model of standing SAW acoustofluidic devices for obtaining particle motion. The "improved limiting velocity method" (ILVM) was used to investigate the distribution of acoustic pressure and acoustic streaming in microchannel. The results show that the distribution of acoustic pressure and acoustic streaming on the piezoelectric substrate surface perpendicular to the acoustic wave propagation direction is inhomogeneous. The motion of micro-particles with diameters of 0.5-, 5-, and 10 μm is then simulated to investigate the interaction of acoustic radiation force and drag force caused by pressure and acoustic streaming. We demonstrate that micro and nanoparticles can move in three dimensions when acoustic radiation force and acoustic streaming interact. This result and method are critical for designing SAW microfluidic chips and controlling particle motion precisely.