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Updated: Aug 15, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
A hybrid learning-based stochastic noise eliminating method with attention-Conv-LSTM network for low-cost MEMS
Yaohua Liu1,2,3, Jinqiang Cui3, Wei Liang1,2
1School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, China.
Abstract:
Low-cost inertial measurement units (IMUs) based on microelectromechanical system (MEMS) have been widely used in self-localization for autonomous robots due to their small size and low power consumption. However, the low-cost MEMS IMUs often suffer from complex, non-linear, time-varying noise and errors. In order to improve the low-cost MEMS IMU gyroscope performance, a data-driven denoising method is proposed in this paper to reduce stochastic errors. Specifically, an attention-based learning architecture of convolutional neural network (CNN) and long short-term memory (LSTM) is employed to extract the local features and learn the temporal correlation from the MEMS IMU gyroscope raw signals. The attention mechanism is appropriately designed to distinguish the importance of the features at different times by automatically assigning different weights. Numerical real field, datasets and ablation experiments are performed to evaluate the effectiveness of the proposed algorithm. Compared to the raw gyroscope data, the experimental results demonstrate that the average errors of bias instability and angle random walk are reduced by 57.1 and 66.7%.
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