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Out-of-plane displacement sensor based on the Talbot effect in angular-modulated double-layer optical gratings.

Bin Cao, Rui Zhang, Qianqi Niu

|January 6, 2023

Summary

This summary is machine-generated.

We developed a novel, compact optical displacement sensor using the Talbot effect and gratings. This sensor achieves 11.23 nm resolution for measuring out-of-plane motion up to 1 mm.

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Area of Science:

Optics
Optical Metrology
Nanotechnology

Background:

The Talbot effect describes self-imaging of periodic structures under coherent illumination.
Existing optical displacement sensors often lack compactness or require complex setups.
Precise measurement of out-of-plane displacement is crucial in various scientific and industrial applications.

Purpose of the Study:

To propose and demonstrate a novel, ultracompact optical displacement sensor.
To leverage the Talbot effect for high-resolution, non-contact displacement measurement.
To achieve sub-nanometer resolution for out-of-plane motion detection.

Main Methods:

Utilizing two optical gratings with a slight angular separation.
Generating two 90° phase-shifted angular-modulated signals.
Employing a two-quadrant photodetector and an interpolation subdivision circuit (factor 1000).
Measuring displacement perpendicular to the grating plane.

Main Results:

Achieved sinusoidal relationship between signals and out-of-plane displacement.
Demonstrated a measurement resolution of 11.23 nm.
Verified functionality within a 1 mm displacement range.
The sensor exhibits an ultracompact structure.

Conclusions:

The proposed Talbot effect-based sensor offers a novel and compact solution for optical displacement sensing.
High resolution (11.23 nm) and a practical measurement range (1 mm) are achieved.
This technology has potential applications in precision engineering, microscopy, and semiconductor manufacturing.