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Micro-Vision Based High-Precision Space Assembly Approach for Trans-Scale Micro-Device: The CFTA Example.

Juan Zhang1, Xi Dai1, Wenrong Wu1

  • 1Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China.

Sensors (Basel, Switzerland)
|January 8, 2023
PubMed
Summary
This summary is machine-generated.

This study presents a high-precision micro-vision assembly approach for trans-scale micro-device capsule fill tube assemblies (CFTA) used in inertial confinement fusion (ICF) targets, achieving sub-5 μm accuracy.

Keywords:
glue mass controlmicro-assemblymicro-visionmulti-vision monitoring modelposture alignmenttrans-scale micro-device assembly

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Area of Science:

  • Micro-assembly and precision engineering
  • Fusion energy target fabrication
  • Robotics and machine vision

Background:

  • Inertial confinement fusion (ICF) requires highly precise components for target fabrication.
  • Current assembly methods for trans-scale micro-devices face challenges in precision and alignment.
  • Capsule fill tube assemblies (CFTA) are critical components in ICF targets.

Purpose of the Study:

  • To propose and validate a high-precision space assembly approach for trans-scale micro-device CFTA.
  • To address challenges in aligning and assembling micro-parts with significant size differences (microns to hundreds of microns).
  • To enable quantitative control over glue mass for reliable micro-bonding.

Main Methods:

  • Development of a multi-vision monitoring model for 5-degree-of-freedom (DOF) posture alignment of trans-scale micro-parts.
  • Implementation of a local deformation detection method for precise micro-part insertion depth control.
  • Utilizing simulation research for quantitative glue mass control and bonding.
  • Experimental validation using computerized tomography (CT) for 3D spatial error measurement.

Main Results:

  • Attitude alignment control error < ±0.3°, position alignment control error < ±5 µm.
  • Insertion depth control error < ±5 µm, with glue spot diameter deviation < 15 μm.
  • Assembled CFTA exhibited 3D position error < 5 μm and a joint glue spot diameter of 56 μm.
  • Glue mass estimated at approximately 23 PL for a specific cone geometry.

Conclusions:

  • The proposed micro-vision based assembly approach significantly enhances precision in CFTA fabrication for ICF.
  • The multi-module system effectively addresses alignment, insertion, and bonding challenges in trans-scale micro-assembly.
  • Experimental results validate the system's capability to achieve sub-5 μm accuracy, crucial for fusion targets.