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Low-aberration ExB deflector optics for scanning electron microscopy.

Momoyo Enyama1,2, Ryuji Nishi1,3, Hiroyuki Ito1,4

  • 1Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.

Microscopy (Oxford, England)
|January 11, 2023
PubMed
Summary

We developed ExB deflector optics to reduce aberrations in scanning electron microscopes. This new system significantly improves signal electron detection resolution for better imaging.

Keywords:
ExB deflectorSEMaberrationelectron opticssignal electronsthrough-the-lens detection method

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Area of Science:

  • Electron optics
  • Scanning electron microscopy
  • Aberration correction

Background:

  • Aberrations in signal electron optics limit resolution in scanning electron microscopes (SEMs).
  • Large-angle electron deflection is particularly prone to generating significant aberrations.
  • Improved detection of signal electron angle and position is crucial for advanced SEM applications.

Purpose of the Study:

  • To propose and evaluate novel ExB deflector optics for suppressing aberrations in SEM signal electron optics.
  • To enhance the resolution of signal electron angle and position detection.
  • To demonstrate the effectiveness of the proposed optics in reducing beam aberrations.

Main Methods:

  • Design of a novel ExB deflector optics system incorporating two ExB deflectors and a 4-f transfer system.
  • Utilizing ray-tracing simulations to model electron beam trajectories and aberration propagation.
  • Analyzing the aberration cancellation effect through symmetric beam path design.

Main Results:

  • The proposed ExB deflector optics reduced aberrations by up to a factor of ten compared to single-deflector systems.
  • Simulations confirmed the cancellation of aberrations generated by the first deflector by the second.
  • Demonstrated a potential angular resolution of 1° for detecting signal electrons emitted within an 80° range.

Conclusions:

  • The proposed ExB deflector optics effectively suppress aberrations in SEM signal electron optics.
  • This technology offers a significant improvement in the resolution of signal electron detection.
  • The ExB deflector optics are a promising advancement for enhancing SEM imaging capabilities.