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Updated: Aug 13, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Nonvolatile waveguide transmission tuning with electrically-driven ultra-small GST phase-change material
Hanyu Zhang1, Linjie Zhou1, Jian Xu1
1State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Abstract:
Low-power reconfigurable optical circuits are highly demanded to satisfy a variety of different applications. Conventional electro-optic and thermo-optic refractive index tuning methods in silicon photonics are not suitable for reconfiguration of optical circuits due to their high static power consumption and volatility. We propose and demonstrate a nonvolatile tuning method by utilizing the reversible phase change property of GST integrated on top of the silicon waveguide. The phase change is enabled by applying electrical pulses to the μm-sized GST active region in a sandwich structure. The experimental results show that the optical transmission of the silicon waveguide can be tuned by controlling the phase state of GST.

