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Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer.

Yu Feng1, Wuhao Yang2, Xudong Zou1,2,3

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Summary

We developed a new photonic integrated accelerometer using optical mode localization. This novel sensor offers high sensitivity and a wide measurement range, rivaling current MEMS accelerometers.

Keywords:
displacement detectionmicro-opto-electro-mechanical systemoptical mode localizationsuspended directional coupler

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Area of Science:

  • Photonics
  • Integrated Optics
  • MEMS Technology

Background:

  • Accelerometers are crucial inertial sensors.
  • Existing micro-electro-mechanical systems (MEMS) accelerometers face limitations in sensitivity and range.
  • Optical sensing mechanisms offer potential for enhanced accelerometer performance.

Purpose of the Study:

  • To demonstrate a novel photonic integrated accelerometer.
  • To leverage optical mode localization sensing for high-performance inertial measurement.
  • To design and analyze an accelerometer on a silicon-on-insulator (SOI) wafer.

Main Methods:

  • Design of coupled ring resonators integrated with a suspended directional coupler on a proof mass.
  • Finite Element Analysis (FEA) simulation for mechanical and optical characterization.
  • Numerical analysis to determine sensor performance metrics.

Main Results:

  • Achieved a sensitivity of 10/g (modal power ratio/acceleration).
  • Demonstrated an inertial displacement range of -8 to 10 microns, corresponding to -23.5 to 29.4 g.
  • Calculated an acceleration resolution of 4.874 μg, limited by thermomechanical noise.
  • Observed a free spectral range of 4.05 nm around 1.55 microns.

Conclusions:

  • The proposed optical mode-localized accelerometer exhibits competitive performance compared to existing MEMS devices.
  • This design showcases the potential of optical mode-localized inertial sensors for future state-of-the-art applications.
  • The integration of photonic and MEMS technologies opens new avenues for advanced inertial sensing.