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MOS Capacitor

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A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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High Frequency MEMS Capacitive Mirror for Space Applications.

Alvise Bagolini¹, Anze Sitar¹, Luca Porcelli^2,3

¹Center for Sensors and Devices (SD), Fondazione Bruno Kessler (FBK), Via Sommarive 18, 38123 Trento, Italy.

|January 21, 2023

Summary

This summary is machine-generated.

Novel Micro Electromechanical (MEMS) mirrors using aluminum are developed for high-frequency free space optics laser communication. These mirrors achieve over 2 MHz operation with low voltage, demonstrating good performance for advanced optical communication systems.

Keywords:

MEMS free space optics micromirrors

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Area of Science:

Optics and Photonics
Materials Science
Electrical Engineering

Background:

Free space optics laser communication demands high-frequency active mirrors (>100 kHz) for substantial data transfer.
Micro Electromechanical (MEMS) mirrors offer potential for high-frequency applications due to their minimal moving mass.

Purpose of the Study:

To present capacitive MEMS mirrors specifically designed for free space optical communication.
To introduce a novel fabrication sequence for these MEMS mirrors.

Main Methods:

A new fabrication process utilizing a single-layer thin film aluminum mirror and a silicon oxide sacrificial layer.
Characterization of manufactured devices using experimental data and finite element analysis.
Optical characterization of the far-field diffraction pattern to assess mirror performance.

Main Results:

The developed MEMS mirrors operate at high frequencies with an eigenfrequency exceeding 2 MHz.
Low actuation voltage (under 40 V) was achieved due to the novel fabrication.
Aluminum mirror surfaces reduce solar radiation heating compared to gold.
Demonstrated good mirror performance through far-field diffraction pattern analysis.

Conclusions:

The novel fabrication sequence enables high-performance capacitive MEMS mirrors for free space optics.
These MEMS mirrors are suitable for high-frequency laser communication applications.
The study provides data for future optimization of this MEMS technology.