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Updated: Aug 13, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators

Dayao Meng1, Kun Huang1, Wei Xu1

  • 1Department of Engineering Mechanics, Faculty of Civil Engineering and Mechanics, Kunming University of Science and Technology, Kunming 650500, China.

Micromachines
|January 21, 2023
PubMed

Keywords:
electric actuationmicrobeam resonatorsmultiple-scale methodnonlinear vibrationprimary resonancescale effect

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