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A Calibration Method for the Resolution of 2D TPP Laser Direct Writing
Yu Xie1, Yixiong Chen1, Hang Xu1
1School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China.
Micromachines
|January 21, 2023
Summary
This study introduces 2D two-photon polymerization (TPP) for efficient micro-nano fabrication. A novel 45° scanning method and regression model calibrate resolution, enabling precise aluminum wire grid creation.
Area of Science:
- Materials Science
- Nanotechnology
- Laser Fabrication
Background:
- Two-photon polymerization (TPP) is a key technique for micro- and nano-fabrication.
- Improving TPP efficiency and resolution calibration is crucial for advanced applications.
Purpose of the Study:
- To develop an efficient 2D TPP method for micro-nano fabrication.
- To explore the resolution limits of 2D TPP and establish a calibration method.
Main Methods:
- A single-line scan 2D TPP process was developed.
- A 45° scanning method was proposed to explore resolution limits.
- Experiments using orthogonal decomposition analyzed voxel dimensions.
- Aluminum wire grids were fabricated via 2D TPP and metal lift-off.
Main Results:
- A second-order regression equation relating machining resolution to 2D TPP parameters was deduced.
- A strong positive correlation (0.961) was found between voxel width and fabricated aluminum wire grid resolution.
- The regression model was validated experimentally.
Conclusions:
- The proposed 2D TPP method offers a convenient, low-cost, and high-efficiency approach for micro-nano fabrication.
- This work provides a reliable method for calibrating TPP fabrication resolution across different photoresists.
