High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps.

Yuichi Kurashima1, Taisei Motomura2, Shinya Yanagimachi3

  • 1Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Ibaraki 305-8564, Japan.

Summary

We developed an efficient plasma source for miniature ion pumps using a magnetic mirror trap. This design enhances electron confinement, improving plasma generation in high-vacuum conditions.

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