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Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer
Jenna Multia1, Dmitry E Kravchenko2, Víctor Rubio-Giménez2
1Department of Chemistry and Materials Science, Aalto University, Aalto FI-00076, Finland.
ACS Applied Nano Materials
|February 6, 2023
Abstract:
Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.
