Updated: Aug 10, 2025

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
Jiaming Yan1, Caihui Chen2, Zhipeng Wu2
1School of Microelectronics, Shanghai University, Shanghai 201800, China.
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
This study introduces an acoustic sensor using a microelectromechanical system (MEMS) microphone array for precise partial discharge (PD) localization in high-voltage equipment. The system achieves an average localization error of 0.04 m, enhancing equipment safety.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: