Simulation-Assisted Process Design and Experimental Verification of Laterally Confined Oxide Areas Generated with

Susanne Quitzke1, Igor Danilov1, André Martin1

  • 1Professorship Micromanufacturing Technology, Faculty of Mechanical Engineering, Chemnitz University of Technology, 09107 Chemnitz, Germany.

Micromachines
|February 25, 2023
PubMed

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