Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Polarization entanglement generation in silicon nitride waveguide-coupled dual microring resonators.

Optics express·2024
Same author

Parallel wavelength-division-multiplexed signal transmission and dispersion compensation enabled by soliton microcombs and microrings.

Nature communications·2024
Same author

Continuously tunable silicon optical true-time delay lines with a large delay tuning range and a low delay fluctuation.

Optics express·2024
Same author

On-chip passive pump-rejection long-pass filters for integrated SiC-based nonlinear and quantum photonic chips.

Optics letters·2024
Same author

Integrated Si<sub>3</sub>N<sub>4</sub> microresonator-based quantum light sources with high brightness using a subtractive wafer-scale platform.

Optics express·2021
Same author

Stress-released Si<sub>3</sub>N<sub>4</sub> fabrication process for dispersion-engineered integrated silicon photonics.

Optics express·2020
Same journal

Correction: Kang et al. Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester. <i>Micromachines</i> 2024, <i>15</i>, 581.

Micromachines·2026
Same journal

Femtosecond Laser Texturing of Wood Coatings with Bio-Based Epoxy and Wax Additives for Enhanced Hydrophobicity.

Micromachines·2026
Same journal

Engineering of Optoelectronic Devices for Renewable Energy Applications.

Micromachines·2026
Same journal

Phase Transformation and Electrochemical Behavior of Hexagonal TiO<sub>2</sub> Nanotubes Under Different Annealing Temperatures and Heating Rates.

Micromachines·2026
Same journal

Process Optimization and Predictive Modeling of Femtosecond Laser Precision Milling for Commercial PMMA Slices.

Micromachines·2026
Same journal

A Hybrid Preprocessing Multi-Objective Surrogate Model for Thermal MEMS Actuators.

Micromachines·2026
See all related articles

Related Experiment Video

Updated: Aug 8, 2025

Fabrication and Testing of Photonic Thermometers
08:44

Fabrication and Testing of Photonic Thermometers

Published on: October 24, 2018

5.9K

A 3C-SiC-on-Insulator-Based Integrated Photonic Platform Using an Anodic Bonding Process with Glass Substrates.

Jiayang Li1, Andrew W Poon1

  • 1Photonic Device Laboratory, Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong.

Micromachines
|February 25, 2023
PubMed
Summary
This summary is machine-generated.

This study presents a novel 3C-silicon carbide-on-insulator (3C-SiCoI) platform for integrated photonics. The new platform enables efficient optical confinement and is suitable for large-scale integration of photonic devices.

Keywords:
3C-SiCSiC photonicsanodic bondingintegrated photonicsmicroring resonators

More Related Videos

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
10:32

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

7.5K
Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
10:14

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

Published on: March 6, 2016

12.9K

Related Experiment Videos

Last Updated: Aug 8, 2025

Fabrication and Testing of Photonic Thermometers
08:44

Fabrication and Testing of Photonic Thermometers

Published on: October 24, 2018

5.9K
Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
10:32

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

7.5K
Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
10:14

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

Published on: March 6, 2016

12.9K

Area of Science:

  • Materials Science
  • Optoelectronics
  • Nanotechnology

Background:

  • Crystalline silicon carbide (SiC) polytypes offer wide bandgaps and nonlinear optical properties, but wafer forms lack refractive index contrast for optical confinement.
  • Realizing integrated photonic platforms with SiC is challenging due to limitations in existing wafer forms.

Purpose of the Study:

  • To demonstrate a 3C-SiC-on-insulator (3C-SiCoI) integrated photonic platform.
  • To enable optical confinement in SiC for advanced photonic applications.

Main Methods:

  • Epitaxial 3C-SiC layer transfer from silicon to borosilicate glass using anodic bonding.
  • Fabrication of waveguide-coupled microring resonators via sulfur hexafluoride (SF6)-based dry etching.
  • Characterization to exclude photorefractive effects at low optical power.

Main Results:

  • Achieved nearly 100% area transfer die-to-wafer bonding.
  • Demonstrated microring resonators with a loaded quality (Q) factor of 1.4 × 105.
  • Confirmed the absence of photorefractive effects at sub-milliwatt optical power levels.

Conclusions:

  • The developed 3C-SiCoI platform overcomes previous limitations for integrated photonics.
  • This platform is highly promising for large-scale integration of linear, nonlinear, and quantum photonic devices.