Conduction Conditions for Self-Healing of Metal Interconnect Using Copper Microparticles Dispersed with Silicone Oil

Naoki Suetsugu1, Eiji Iwase1

  • 1School of Fundamental Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku-ku, Tokyo 169-8555, Japan.

Micromachines
|February 25, 2023
PubMed
Summary

Copper microparticle chains bridge metal interconnect gaps via dielectrophoresis, achieving electrical conductivity above 14 Vrms. Optimal bridging requires specific voltage and current conditions to prevent bridge destruction.