Optical Hydrogen Sensing Properties of e-Beam WO₃ Films Decorated with Gold Nanoparticles

Tungsten oxide thin films with different thicknesses, crystallinity and morphology were synthesized by e-beam deposition followed by thermal treatment and acid boiling. The films with different surface morphologies were coated with gold nanoparticles and tested as optical sensing materials towards hydrogen. X-ray diffraction, scanning electron microscopy, ellipsometry and UV-VIS spectroscopy were employed to characterize the structural, morphological and optical properties of the film. We demonstrated a good response towards hydrogen in air, reaching a good selectivity among other common reducing gases, such as ammonia and carbon monoxide. The sensitivity has been proven to be highly dependent on the thickness and crystallinity of the samples.