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Design and performance evaluation of a miniature I-shaped linear ultrasonic motor with two vibrators

Zhen Liu1, Qianwei Fu2, Peng Yang1

  • 1Ji Hua Laboratory, Foshan 528200, Guangdong Province, China.

Ultrasonics
|February 28, 2023
PubMed

Keywords:
Finite element methodLinear ultrasonic motorPiezoelectric vibratorStructural designSymmetric and antisymmetric modes

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