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Updated: Jul 16, 2026

Cryo-electron Microscopy Specimen Preparation By Means Of a Focused Ion Beam
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The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam

Peng Shang1,2, Yuanfei Ma1, Zhenyun Zhang1

  • 1GRINM Guojing Advanced Materials Co., Ltd., General Research Institute for Nonferrous Metals, Beijing 100088, China.

Materials (Basel, Switzerland)
|March 11, 2023
PubMed

Keywords:
DLC filmdiamond-like carbonhemisphere domeion beam assisted depositionsurface orientationDLC film propertiesIBAD techniqueSurface orientation effectsThin film deposition

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