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Updated: Aug 6, 2025

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
Structural Polymorphism Kinetics Promoted by Charged Oxygen Vacancies in HfO_{2}.
Li-Yang Ma1,2, Shi Liu2,3
1Fudan University, Shanghai 200433, China.
Positively charged oxygen vacancies in hafnium oxide (HfO_{2}) thin films kinetically promote ferroelectric phase transitions. This discovery sheds light on exotic effects like wake-up and fluid imprint in HfO_{2}-based devices.
Area of Science:
- Materials Science
- Solid State Physics
- Computational Materials Science
Background:
- Oxygen vacancies are critical defects in ferroelectric hafnium oxide (HfO_{2}) devices.
- Atomistic mechanisms for phenomena like wake-up and fluid imprint are not fully understood.
Purpose of the Study:
- To investigate the influence of oxygen vacancy charge states on HfO_{2} polymorph phase transitions.
- To elucidate the kinetic pathways governing ferroelectricity in HfO_{2}-based materials.
Main Methods:
- First-principles calculations combined with variable-cell nudged elastic band technique.
- Application of a lattice-mode-matching criterion for studying phase transitions.
- Systematic analysis of neutral and positively charged oxygen vacancies.
Main Results:
- Positively charged oxygen vacancies kinetically facilitate transitions from nonpolar to polar phases.
- A transient high-energy tetragonal phase plays a key role in these transitions.
- The polar Pca2_{1} phase exhibits extreme charge-carrier-inert ferroelectricity.
Conclusions:
- The charge state of oxygen vacancies intricately couples with structural polymorphism kinetics.
- This coupling is crucial for understanding ferroelectricity, wake-up, fluid imprint, and inertial switching in HfO_{2} thin films.
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