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This study presents a miniaturized micro-electro-mechanical-system (MEMS) weighing cell. Successful fabrication and experimental validation demonstrate its potential for high-precision force measurements.

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Area of Science:

  • Micro-electro-mechanical-systems (MEMS)
  • Mechanical Engineering
  • Metrology

Background:

  • Traditional macroscopic electromagnetic force compensation (EMFC) weighing cells face limitations in miniaturization.
  • Developing microscale force sensors is crucial for advanced measurement applications.

Purpose of the Study:

  • To design, fabricate, and characterize a miniaturized MEMS-based weighing cell.
  • To analyze the system stiffness, a critical parameter for weighing cell performance.
  • To validate the performance of the MEMS weighing cell through experimental measurements.

Main Methods:

  • Analytical evaluation of system stiffness using a rigid body approach.
  • Numerical modeling of stiffness using the finite element method (FEM).
  • Microfabrication of MEMS weighing cell prototypes.
  • Experimental determination of stiffness via static force-displacement measurements.

Main Results:

  • Analytical and numerical stiffness calculations were performed.
  • MEMS weighing cell prototypes were successfully microfabricated.
  • Experimental stiffness measurements showed good agreement with calculated values (deviation -6.7 to 3.8%).

Conclusions:

  • MEMS-based weighing cells can be successfully fabricated using the proposed microfabrication process.
  • These devices show potential for future high-precision force measurements.
  • Further improvements in system design and read-out strategies are necessary for optimal performance.