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A Filter-Free Third Overtone Quartz Oscillator Based on Micromachining Technology.

Chin-Yu Chang, Chien-Cheng Yang, Sheng-Shian Li

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
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    Summary

    This study suppresses the fundamental mode in quartz crystal oscillators using micromachining. This allows enhanced third overtone operation, achieving high-frequency oscillation with improved phase noise performance.

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    Area of Science:

    • Electrical Engineering
    • Materials Science
    • Physics

    Background:

    • Quartz crystal oscillators (XOs) are crucial for frequency generation.
    • Operating XOs at higher overtones can increase frequency but is challenging due to fundamental mode interference.
    • Existing methods for overtone operation often require complex filtering.

    Purpose of the Study:

    • To investigate an AT-cut quartz crystal oscillator operating at its third overtone thickness shear (TS) mode.
    • To suppress the fundamental TS mode using micromachining technology.
    • To improve the performance of the third overtone mode in terms of Q-factor and motional resistance.

    Main Methods:

    • Proposed a unique quartz plate structure to alleviate the fundamental resonant signal.
    • Utilized finite-element method (FEM) for characterization and performance analysis.
    • Conducted measurements of unloaded Q-factor, motional resistance, and phase noise.

    Main Results:

    • Successfully suppressed the fundamental TS mode, reducing its unloaded Q-factor from tens of thousands to several hundred.
    • Achieved an unloaded Q-factor of ~95,000 for the third overtone mode with a decent motional resistance.
    • Demonstrated a Q-factor ratio of 170-180 between the third overtone and fundamental modes.
    • Attained phase noise performance of -154.5 dBc/Hz at a 1-kHz offset at ~60 MHz carrier frequency.

    Conclusions:

    • The proposed micromachining technique effectively suppresses the fundamental mode, enabling enhanced third overtone operation.
    • The device achieves high Q-factor and good motional resistance for the third overtone.
    • This technique offers a promising solution for high-frequency quartz oscillator technology without external filtering.