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Highly Regular LIPSS on Thin Molybdenum Films: Optimization and Generic Criteria.
Juraj Sládek1,2, Kryštof Hlinomaz1,2, Inam Mirza1
1HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic.
Materials (Basel, Switzerland)
|April 13, 2023
Summary
Researchers identified optimal laser conditions for creating highly regular laser-induced periodic surface structures (HR-LIPSS) on molybdenum films. This study details the laser parameters needed for precise, large-area surface structuring.
Area of Science:
- Materials Science
- Nanotechnology
- Laser Physics
Background:
- Laser-induced periodic surface structures (LIPSS) offer unique surface properties.
- Fabricating highly regular LIPSS (HR-LIPSS) over large areas is challenging.
- Understanding material-laser interactions is key for controlled nanostructuring.
Purpose of the Study:
- To determine optimal laser irradiation conditions for large-area HR-LIPSS fabrication.
- To investigate the influence of laser parameters on LIPSS regularity.
- To analyze the underlying physical mechanisms of HR-LIPSS formation on Mo films.
Main Methods:
- Systematic experimental study using a 1030 nm, 1.4 ps pulsed laser.
- Scanning electron microscopy (SEM) for structural analysis.
- Dispersion of LIPSS orientation angle (DLOA) as a regularity criterion.
- Theoretical analysis of film heating and surface plasmon polariton excitation.
Main Results:
- Identified favorable laser fluence and beam scanning overlaps for HR-LIPSS.
- Achieved DLOA values below 10 degrees, indicating high regularity.
- Provided insights into film heating and potential surface plasmon excitation.
- Discussed the possible role of film dewetting in the process.
Conclusions:
- Optimal laser parameters were established for reproducible, large-area HR-LIPSS fabrication on Mo films.
- The study contributes to the understanding of nanostructure formation via laser-matter interaction.
- Findings are relevant for applications requiring precisely structured surfaces.

