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Calibrate the non-orthogonal error of AFM with two-dimensional self-traceable grating
Wen Tan1, Zhaohui Tang1, Guangxu Xiao1
1Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China; MOE Key Laboratory of Advanced Micro-Structured Materials, Tongji University, Shanghai 200092, China; Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, China; Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, Tongji University, Shanghai 200092, China; School of Physics Science and Engineering, Tongji University, Shanghai 200092, China.
This study introduces a method to calibrate non-orthogonal errors in atomic force microscopy (AFM) using a 2D self-traceable grating. This calibration is crucial for accurate nanoscale measurements of advanced materials.
Area of Science:
- Metrology
- Nanotechnology
- Materials Science
Background:
- Accurate nanoscale measurements are critical for advanced materials.
- Non-orthogonal errors in atomic force microscopy (AFM) hinder measurement traceability.
- Calibrating these errors is essential for reliable characterization of novel materials and 2D crystals.
Purpose of the Study:
- To characterize non-orthogonal errors in AFM scans.
- To develop a protocol for optimizing AFM scanning parameters to minimize these errors.
- To present a method for calibrating commercial AFM systems for non-orthogonal errors.
Main Methods:
- Utilized a 2D self-traceable grating with a precise theoretical non-orthogonal angle.
- Employed a Metrological Large Range Scanning Probe Microscope (Met. LR-SPM) for measurements.
- Established a detailed uncertainty budget and error analysis for calibration.
Main Results:
- Characterized local and overall non-orthogonal errors in AFM scans.
- Proposed and validated a protocol for tuning AFM parameters to reduce non-orthogonal errors.
- Demonstrated the effectiveness of the 2D self-traceable grating for calibrating precision instruments.
Conclusions:
- The 2D self-traceable grating is highly advantageous for calibrating precision metrology instruments.
- The developed protocol enables accurate calibration of non-orthogonal errors in commercial AFM systems.
- Improved calibration enhances the reliability of nanoscale measurements for advanced materials.
