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Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor
Mahdieh Yariesbouei1, Remco G P Sanders1, Remco J Wiegerink1
1Integrated Devices and Systems, University of Twente, 7500 AE Enschede, The Netherlands.
Sensors (Basel, Switzerland)
|April 28, 2023
Summary
This study details a novel 3D-printed Coriolis mass flow sensor. The developed micro-sensor demonstrates effective flow measurement for liquids and gases with minimal pressure drop.
Area of Science:
- Microfluidics
- Sensor Technology
- Additive Manufacturing
Background:
- Coriolis mass flow sensors are crucial for precise fluid measurement.
- Traditional fabrication methods can be complex and costly for micro-scale devices.
- 3D printing offers a promising avenue for rapid prototyping and customization of micro-sensors.
Purpose of the Study:
- To model, fabricate, and test a 3D-printed Coriolis mass flow sensor.
- To evaluate the performance of the micro-sensor for various fluids.
- To assess the pressure drop characteristics of the sensor.
Main Methods:
- Utilized LCD 3D-printing for fabricating a free-standing tube (42 mm length, 900 µm inner diameter).
- Applied copper plating for low electrical resistance (0.5 Ω) and actuated the tube using AC current and a magnetic field.
- Detected tube displacement with a laser Doppler vibrometer (LDV) integrated into a Polytec MSA-600 microsystem analyzer.
Main Results:
- Tested flow ranges: 0-150 g/h (water), 0-38 g/h (IPA), 0-50 g/h (nitrogen).
- Achieved < 30 mbar pressure drop for water and IPA at maximum flow rates.
- Observed a 250 mbar pressure drop for nitrogen at its maximum flow rate.
Conclusions:
- Successfully demonstrated a functional 3D-printed Coriolis mass flow sensor.
- The micro-sensor is suitable for measuring flow rates of liquids and gases.
- The low pressure drop for liquids indicates efficient sensor design for microfluidic applications.
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