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Compact Micro-Coriolis Mass-Flow Meter with Optical Readout.

Mahdieh Yariesbouei1, Remco G P Sanders1, Remco J Wiegerink1

  • 1Integrated Devices and Systems, University of Twente, 7522 NB Enschede, The Netherlands.

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Summary
This summary is machine-generated.

This study introduces a novel nickel-plated micro-Coriolis mass-flow sensor with optical readout. It demonstrates accurate fluid measurements, paving the way for advanced flow sensing applications.

Keywords:
compact micro-Coriolis mass-flow meternickel electroplated tubeoptical readout

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Area of Science:

  • Micro-electro-mechanical systems (MEMS)
  • Sensor technology
  • Fluid dynamics

Background:

  • Traditional mass-flow sensors face limitations in miniaturization and integrated readout.
  • Developing micro-scale sensors is crucial for advanced fluid monitoring in various applications.

Purpose of the Study:

  • To present the first nickel-plated micro-Coriolis mass-flow sensor with integrated optical readout.
  • To characterize the sensor's performance with different fluids.

Main Methods:

  • Fabrication of a U-shaped, nickel-plated micro-tube sensor (60 mm length, 580 µm inner diameter).
  • Actuation using Lorentz forces and motion detection via optical readout (LEDs and phototransistors).
  • Mass-flow measurements of water and isopropyl alcohol at room temperature.

Main Results:

  • The sensor exhibited distinct resonance frequencies for twist and swing modes for both fluids.
  • Measured resonance frequencies for water: 1.67 kHz (twist), 738 Hz (swing).
  • Measured resonance frequencies for isopropyl alcohol: 1.70 kHz (twist), 752 Hz (swing).
  • Linear response of phase shift to mass flow with high sensitivity (0.41 mdeg/(g/h) for water, 0.43 mdeg/(g/h) for isopropyl alcohol).

Conclusions:

  • The nickel-plated micro-Coriolis mass-flow sensor with optical readout is successfully demonstrated.
  • The sensor shows potential for accurate and sensitive fluid mass-flow measurement.
  • This technology offers a promising solution for micro-scale fluid monitoring.