Piezoelectric deformable mirror driven by unimorph actuator arrays on multi-spatial layers

In order to reduce the cost of the piezo actuator array deformable mirror (DM), a piezoelectric DM driven by unimorph actuator arrays on multi-spatial layers is proposed. The actuator density can be multiplied by increasing the spatial layers of the actuator arrays. A low-cost DM prototype with 19 unimorph actuators located on three spatial layers is developed. The unimorph actuator can generate a wavefront deformation up to 11 µm at an operating voltage of 50 V. The DM can reconstruct typical low-order Zernike polynomial shapes accurately. The mirror can be flattened to 0.058 µm in RMS. Furthermore, a focal spot close to Airy spot is obtained in the far field after the aberrations of the adaptive optics testing system being corrected.