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Updated: Jul 30, 2025

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Highly conformable chip-in-foil implants for neural applications.

Thomas Stieglitz1,2, Calogero Gueli1, Julien Martens1,2

  • 1Laboratory for Biomedical Microtechnology, Department of Microsystems Engineering - IMTEK, University of Freiburg, D-79110 Freiburg, Germany.

Microsystems & Nanoengineering
|May 14, 2023
PubMed
Summary

This study developed a flexible neural implant by embedding silicon chips in polymer substrates. Design rules were identified to improve mechanical compliance and enable scalable, modular neural interface systems.

Keywords:
Bioelectronic DevicesChip-in-FoilConformable SubstrateHybrid ImplantsImplantable Flexible SystemMicrofabricationPolyimide

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Area of Science:

  • Biomedical Engineering
  • Materials Science
  • Neuroscience

Background:

  • Increasing demands for high-resolution, long-lasting neural interfaces require advanced materials and designs.
  • Sophisticated silicon-based integrated circuits are crucial for meeting these functional requirements.
  • Flexible polymer substrates enhance the biocompatibility and coverage of neural implants.

Purpose of the Study:

  • To address challenges in developing hybrid chip-in-foil neural implants.
  • To optimize mechanical compliance for long-term tissue integration.
  • To enable scalable and modular designs for neural interface systems.

Main Methods:

  • Finite element modeling (FEM) to establish design rules for die geometry, interconnect routing, and contact pad placement.
  • Development of a microfabrication process for transferring, aligning, and interconnecting multiple dice onto polyimide substrates.
  • Assessment of mechanical compliance and structural integrity of the hybrid implant.

Main Results:

  • Edge fillets in die bases improve die-substrate integrity and expand contact pad areas.
  • Avoiding interconnect routing near die corners mitigates substrate stress concentration.
  • Strategic placement of contact pads prevents delamination during implant conformance.

Conclusions:

  • The developed hybrid chip-in-foil technology offers a promising approach for advanced neural interfaces.
  • Design guidelines derived from FEM studies are critical for robust and scalable implantable systems.
  • The microfabrication process allows for flexible arrangement of diverse chip types on conformable substrates.