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Updated: Jul 30, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Application of line-scan CMOS camera in multi-beam heterodyne differential laser Doppler vibration sensor
Abstract:
The possibility of using a line-scan digital CMOS camera as a photodetector in a multi-beam heterodyne differential laser Doppler vibration sensor has been investigated. Application of the line-scan CMOS camera allows for selection of a different number of beams for a particular application in the sensor design, and for a compact design of the sensor. It was demonstrated that a limitation of the maximum measured velocity caused by the camera limited line rate can be overcome by selecting the beams separation on the object and the value of shear between images on the camera.
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