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Updated: Jul 29, 2025

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Optical phased array with on-chip phase calibration
Optics Letters
|May 23, 2023
Summary
This study presents an on-chip phase calibration system for optical phased arrays (OPAs). This integrated system enables accurate beam steering and arbitrary pattern generation with high fidelity and low complexity.
Area of Science:
- Photonics
- Integrated Optics
- Beamforming Technology
Background:
- Robust beamforming in optical phased arrays (OPAs) requires precise phase monitoring and control.
- Existing calibration methods can be complex and computationally intensive.
Purpose of the Study:
- To demonstrate an on-chip integrated phase calibration system for high-fidelity beam steering in OPAs.
- To enable linear complexity calibration and arbitrary optical beam generation.
Main Methods:
- Fabrication of a 32-channel OPA with a 2.5-µm pitch using an Si-SiN photonic stack.
- Integration of compact phase interrogator structures and silicon photon-assisted tunneling detectors (PATDs) for readout.
- Implementation of a model-based calibration procedure for phase-error correction.
Main Results:
- Achieved high-fidelity beam steering with a sidelobe suppression ratio (SLSR) of -11 dB.
- Demonstrated a beam divergence of 0.97° × 0.58° at a 1.55-µm wavelength.
- Successfully performed wavelength-dependent calibration for full 2D beam steering and arbitrary pattern generation.
Conclusions:
- The developed on-chip calibration system significantly enhances OPA performance for beamforming applications.
- The integrated approach offers a low-complexity solution for accurate phase control and versatile beam generation.
- The use of PATDs allows for sub-bandgap light detection without additional fabrication steps.
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