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Updated: May 28, 2026

Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations
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Three-phase ScAlN-based PMUT-driven acoustic streaming micropump.

Chen Wu1,2, Grim Keulemans3, Benjamin Jones3

  • 1Electrical Engineering Department (ESAT), Katholieke Universiteit Leuven (KU Leuven), B-3001, Leuven, Belgium. chen.wu2@imec.be.

Microsystems & Nanoengineering
|May 26, 2026
PubMed
Summary
This summary is machine-generated.

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This study demonstrates a Scandium-doped Aluminum Nitride (ScAlN)-based piezoelectric micromachined ultrasonic transducer (PMUT) array for micro-pumping. The ScAlN PMUT array generates directional acoustic streaming for precise fluid handling in microfluidic systems.

Area of Science:

  • Microfluidics and Nanotechnology
  • Acoustofluidics
  • Materials Science

Background:

  • Scandium-doped aluminum nitride (ScAlN) piezoelectric micromachined ultrasonic transducer (PMUT) arrays are gaining traction in acoustofluidics for micro total analysis systems (μTAS).
  • While effective for bioparticle manipulation via acoustic radiation force, their application in fluid handling through acoustic streaming is less explored.
  • This research addresses the underexplored potential of ScAlN PMUTs for generating directional acoustic streaming for micro-pumping.

Purpose of the Study:

  • To investigate the feasibility of using a rectangular membrane ScAlN-based PMUT array for directional acoustic streaming-based micro-pumping.
  • To demonstrate fluid handling capabilities in a polydimethylsiloxane (PDMS) microfluidic channel.
  • To compare the performance and advantages of the proposed ScAlN PMUT micropump with existing chip-integrable micropumps.

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Last Updated: May 28, 2026

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Main Methods:

  • Fabrication and integration of a rectangular membrane ScAlN PMUT array into a PDMS microfluidic channel.
  • Driving the PMUT array with AC signals featuring a 120° phase difference between adjacent cells to induce directional acoustic streaming.
  • Utilizing numerical multiphysics simulations to predict and optimize flow rates.

Main Results:

  • The ScAlN PMUT array successfully generated directional acoustic streaming for micro-pumping applications.
  • The fabricated device achieved a volumetric flow rate of 0.12 μL/min, consistent with simulation predictions.
  • Numerical optimization indicated potential flow rates of up to 1.0 μL/min through adjustments in array kerf and phase differences.

Conclusions:

  • The ScAlN PMUT array presents a novel and effective approach for micro-pumping using directional acoustic streaming.
  • The proposed micropump offers advantages such as a compact footprint, CMOS compatibility, and straightforward on-chip integration.
  • This technology is a promising candidate for μTAS applications requiring precise, low-flow-rate fluid control in miniaturized systems.